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Can bring greater cost efficiency to manufacturers and reduce time necessary to bring a new device to market
February 18, 2011
By: DAVID SAVASTANO
Editor, Ink World Magazine
At SPIE Advanced Microlithography in San Jose, CA, Brewer Science will introduce lithographic technologies that can bring greater cost efficiency to manufacturers and reduce the time necessary to bring a new device to market. Brewer Science is pleased to present the following technologies during the SPIE poster session Tuesday, March 1: Novel Materials • Implementation of KrF DBARCs for implant applications on advanced lithography nodes (Paper 7972-78) • Tailorable BARC system to provide o...
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